探针台,自动探针台,探针台,自动化探针台, ES650型自动化探针系统是一种2针探测解决方案，适用于封装级、晶圆级和电路板级器件上的HBM、MM、TLP、HMM、CC-TLP、LI-CCDM、RP-CCDM和CDM（JS-002）测量的自动化探针台。除ESD测试解决方案外，ES650还可单独用于其自动化探测功能，使以下探针应用达到精确自动化：射频测量、I-V曲线跟踪和许多其他需要精确探测的应用。探测系统使用两个独立控制的（左和右）XYZ机架，带有探针，用于接触芯片或晶圆上的引脚或焊盘。ES650不需要插座PCB，与基于继电器的解决方案相比，寄生效应更少。此外，该系统还支持多器件测试，可实现多器件自动分类的测试中故障检查和停止判断标准。
探针台,自动探针台,ES650型自动化探针系统是一种2针探测解决方案，适用于封装级、晶圆级和电路板级器件上的HBM、MM、TLP、HMM、CC-TLP、LI-CCDM、RP-CCDM和CDM（JS-002）测量的自动化探针台。除ESD测试解决方案外，ES650还可单独用于其自动化探测功能，使以下探针应用达到精确自动化：射频测量、I-V曲线跟踪和许多其他需要精确探测的应用。探测系统使用两个独立控制的（左和右）XYZ机架，带有探针，用于接触芯片或晶圆上的引脚或焊盘。ES650不需要插座PCB，与基于继电器的解决方案相比，寄生效应更少。此外，该系统还支持多器件测试，可实现多器件自动分类的测试中故障检查和停止判断标准。HBM脉冲模块提供高达8kV的可靠脉冲，能够将探针连接内部切换至SMU，以便进行泄漏测量，从而在一个解决方案中实现器件应力和故障测试。脉冲模块还可以在内部进行探针左右互换，以避免在自动测试过程中的探针交叉。除HBM脉冲模块外，ES650还配有其他脉冲测试模块（如MM和HMM）以及CDM解决方案（如FICDM、LI-CCDM、CC-TLP和我司正在申请专利的先接触式继电器CDM方法RP-CCDM）。该系统还能够为其他测试方法提供自动化探测，如TLP、EOS、RF探测等。
The probe station, automatic probe station, and ES650 automated probe system are a two-probe testing solution designed for automated probing of HBM, MM, TLP, HMM, CC-TLP, LI-CCDM, RP-CCDM, and CDM (JS-002) measurements on packaged, wafer-level, and PCB-level devices. Beyond ESD testing solutions, the ES650 can also function independently with its automated probing capabilities, enabling precise automation for applications such as RF measurements, I-V curve tracing, and numerous other precision-probing requirements. The probing system employs two independently controlled (left and right) XYZ frames equipped with probes for contacting pins or pads on chips or wafers. The ES650 eliminates the need for socket PCBs, offering fewer parasitic effects compared to relay-based solutions. Additionally, the system supports multi-device testing, enabling fault detection and stopping criteria for automated classification in multi-device testing. The HBM pulse module delivers reliable pulses up to 8kV, allowing internal switching to connect probes to SMUs for leakage measurements, thereby integrating device stress and failure testing into a single solution. The pulse module also supports internal probe swapping (left and right) to prevent probe crossing during automated testing. Beyond the HBM pulse module, the ES650 is equipped with other pulse testing modules (such as MM and HMM) and CDM solutions (like FICDM, LI-CCDM, CC-TLP, and our patented pre-contact relay CDM method RP-CCDM). The system also provides automated probing for other testing methods, including TLP, EOS, RF probing, and more.
